真空设备必备，sputter 标配分子泵，也适用于所有真空行业

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95 Alarm Detection Capabilities 95　Alarm Detection Capabilities NOTICE Alarm history data can be loaded using the serial interface but not using the remote control signal The fault detection functions shown in Table 96 Table of Alarms and Table 97 Table of Warnings are incorporated for protection in the event of a problem with the turbo molecular pump or power supply unit When an error is detected check the STATUS lamp Fig 22 7 and Refer to 953 for the appropriate remedy 951 Movement in Alar......