针对(Co0.35Fe0.65)99O1薄膜，研究了两种不同热处理工艺对其磁性能的影响。结果表明：快速循环热处理可以改善高磁矩(Co0.35Fe0.65)99O1薄膜磁性能，在450°C几个快速循环热处理后，沉积薄膜的矫顽力从105下降到3 Oe，电阻率下降到70％，a-Fe(Co)相晶粒尺寸可以减小到15～35 nm，该处理方法较以往的热处理更能改善软磁薄膜的性能。The variation of magnetic properties with new Rapid Recurrent Thermal Annealing (RRTA) has been studied in high moment thin film (Co0.35Fe0.65)99O1. After the rapid recurrent thermal annealing the coercivity as-deposited this thin film decreases from 105 to 3 Oe at 450℃ for several periods of times, their resistivity decreases to 70%, and the size of a-Fe(Co)phase can be reduced to 15～35 nm by analysis. Results show that the method is more effective than other methods to improve the magnetic and electrical properties of (Co0.35Fe0.65)99O1 thin films.