R
Silicon Wafer Mapping Sensor
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
H
Economical, one sensor detects most
wafer types, including dummy wafers
F3M-S
H
Models match wafer sizes of 300 mm,
200 mm and 150 mm
H
Automatic and remote teaching
capability
H
Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size
6 inches (4.76-mm pitch)
(4.76 mm
8 inches (6.35-mm pitch)
(6.35 mm
12 inches (10-mm pitch)
(10 mm
Number of cassette slots
25
26
25
26
13
25
Function
Self-diagnosis
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Self-diagnosis
---
Self-diagnosis
Self-diagnosis
Remarks
---
---
---
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CE marking
CE marking
Part number
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6j and F3M-S8j)
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
the F3M-S826/-S626.
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function that ensures easy
adjustments within a minimal time. The remote teaching function
allows quick, on-the-fly set up.
Static Electricity Protection
OMRON’s optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor from static electricity that may be charged on
semiconductor wafers at the time of mapping.
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F3M-S
F3M-S
Specifications
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RATINGS/CHARACTERISTICS
Part number
Sensing object
F3M-S625
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
F3M-S1225
6-inch (5-inch) semiconductor
silicon wafers and transparent
wafers (with transparency of
92% max.) (See Note.)
25
4.76 mm
1.5 mm
Infrared LED (940 nm)
12 to 24 VDC 10%, ripple (p-p): 10% max.
120 mA max.
Load power supply voltage: 30 VDC
Load current: 20 mA max. (residual voltage: 1 V max.)
Inflow current: 20 mA
Parallel output from all channels, NPN open collector
Dark-ON operation
When remote teaching is ON, pin 28 will be used for this function.
Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
Indicators
Power
Warning
Response time
Control output interrupt input
---
Load power
supply voltage:
30 VDC max.
Load current:
20 mA max.
(Residual
voltage: 1 V
max.)
Inflow current:
20 mA
NPN open
collector
---
Load power supply voltage:
30 VDC max.
Load current: 20 mA max.
(Residual voltage: 1 V max.)
Inflow current: 20 mA
NPN open collector
26
8-inch semiconductor silicon
wafers and transparent wafers
(with transparency of 92% max.)
(See Note.)
25
6.35 mm
26
12-inch semiconductor silicon
wafers and 12-inch SIC wafers
(with transparency of 30% max.)
13
10 mm
25
Number of channels
Optical axis pitch
Optical axis width
Light source
Power supply voltage
Current consumption
Output
Control
output
Answer-back
output
Self-
diagnostic
output
Green indicator is ON when power is being supplied.
Red indicator is ON under the following conditions:
Teaching, no sensing object, insufficient light, or error.
10 ms max.
All outputs interrupted: GND and control output interrupt input terminals are short-circuited and 0-V
short-circuit current is 1 mA max.
Output interrupt reset: GND and control output interrupt input terminals are opened or the voltage is
between 9 V and the working power supply voltage.
GND and remote input terminals are short-circuited and 0-V short-circuit current is 1 mA max.
GND and remote input terminals are opened or the voltage is between 9 V and the working power
supply voltage.
Orange LED indicator
0 C to 40 C (32 F to 104 F) with no icing or condensation
- 25 C to 60 C (- 13 F to 140 F)
-
-
35% to 85% with no condensation
Fluorescent lamp: 1,500 x max.
Power supply line: 480 V in normal mode with noise simulator
Static electrical noise: No malfunction or destruction at 8 kV
10 to 55 Hz, 0.5-mm double amplitude for 2 hrs each in X, Y, and Z axes
300 m/s
2
(30G) for 3 times each in X, Y, and Z axes
IEC60529 IP40
Preleaded cable (standard cable length: 100 mm)
(This table continues on the next page.)
Remote
teaching
input
ON
OFF
Teaching check function
Ambient
p
temperature
Operating
Storage
Relative humidity
Ambient illumination
Noise resistance
Vibration resistance
Shock resistance
Degree of protection
Connection
0 C to 55 C (32 F to 131 F)
with no icing or condensation
- 25 C to 60 C (- 13 F to 140 F)
-
-
Connector
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F3M-S
Specifications Table
-- continued from previous page
Part number
Weight (packed state)
Material
Optical axis
Case
Cable
Accessories
F3M-S625
Approx. 110 g
Polycarbonate
ABS
Vinyl-insulated, bending type
Spacer and instruction manual
F3M-S626
F3M-S825
F3M-S826
F3M-S1213
Approx. 200 g
F3M-S
F3M-S1225
Approx. 300 g
ABS, aluminum (alumite
treated/clear finish)
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Instruction manual
Note: Operating conditions are restricted for the detection of transparent wafers. Contact your OMRON representatives for details.
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AUTOMATIC TEACHING FUNCTION
F3M-S6j and F3M-S8j
Power indicator
Warning indicator
The remote or manual automatic teaching of the F3M-S is
possible with the following two sensitivity settings:
1. Max. Sensitivity Setting: Detects semiconductor silicon
wafers, translucent dummy wafers, and SIC wafers.
2. Teaching with No Target Object: Detects transparent wafers
(except F3M-S12j).
The sensitivity is set to maximum before shipping. Refer to the
Instruction Manual when setting the sensitivity of the F3M-S.
Teaching button
RUN/TEACH mode selector Teaching indicator
F3M-S12j
RUN/TEACH mode selector
Teaching button
Power indicator
Teaching indicator
Warning indicator
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ANSWER-BACK FUNCTION AND
SELF-DIAGNOSTIC FUNCTION
The F3M-S has an answer-back function to warn the user about
setting errors and a self-diagnostic function (except F3M-S626
and F3M-S826) to warn the user about operational errors.
Answer-back Function: Normal or error teaching output turns
ON.
Self-diagnostic Function: Warning output turns ON for a
decrease in optical input.
4
F3M-S
F3M-S
Operation
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OUTPUT CIRCUIT DIAGRAM
+V
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I/O TERMINAL ARRANGEMENT
Output
(OUT1)
Pin assignment
Pin
Assignment
GND (0 V)
V
CC
(12 to 24 V)
OUT1
OUT2
OUT3
OUT4
OUT5
OUT6
OUT7
OUT8
OUT9
OUT10
OUT11
OUT12
OUT13
Pin
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
Assignment
OUT14
OUT15
OUT16
OUT17
OUT18
OUT19
OUT20
OUT21
OUT22
OUT23
OUT24
OUT25
Self-diagnostic output/OUT26
(see note 1)
Control output interrupt input
Remote teaching input
Main circuit
Output (see note)
(OUT26)
1
2
3
4
5
Control output interrupt input
6
7
8
Remote teaching input
9
10
11
12
13
14
15
0V
Note: When remote teaching is input, this output will be for
answer-back output. For Sensors other than
F3M-S626/F3M-S826, this output is for self-diagnostic
output. For F3M-S626/F3M-S826, this output is OUT26.
Note: 1. Pin 28 will have answer-back output only when remote
teaching input is turned ON. Otherwise, for Sensors
other than F3M-S626/F3M-S826, this output is for self-
diagnostic output. For F3M-S626/F3M-S826, this out-
put is OUT26.
2. For the F3M-S1213, terminals for pins 16 to 27 are not
used.
5
F3M-S
F3M-S
Dimensions
Unit: mm (inch)
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F3M-S625
135 (5.31)
14 (0.55)
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F3M-S626
135 (5.31)
14 (0.55)
Optical axis
18.5 (0.71)
18.5 (0.71)
Optical axis
50
(1.97)
Two,
4.2-dia.
mounting
holes
50
(1.97)
Two, R4
Two,
4.2-dia.
mounting
holes
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
Pitch: 1.27
OMRON XG4E-3031
Connector
Side mark
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
Pitch: 1.27
OMRON XG4E-3031
Connector
(3.94)
Side mark
(3.94)
Teaching button
RUN/TEACH
mode selector
Warning indicator
Teaching indicator
Power indicator
Teaching button
RUN/TEACH
mode selector
Warning indicator
Teaching indicator
Power indicator
Mounting Dimensions
Two, M4
Mounting Dimensions
Two, M4
(4.72)
(4.72)
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F3M-S825
170 (6.69)
14 (0.55)
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F3M-S826
175 (6.89)
14 (0.55)
Optical axis
18.5 (0.71)
18.5 (0.71)
Optical axis
Two, R5
50
(1.97)
Two, R5
50
(1.97)
Side mark
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
Pitch: 1.27
Side mark
Two,
4.2-dia.
mounting
holes
(3.94)
Thirty, (19/0.08 dia.)
vinyl-insulated, flat
bending cable
Width: 38.1
Pitch: 1.27
Two,
4.2-dia.
mounting
holes
(3.94)
OMRON XG4E-3031
Connector
Teaching button
RUN/TEACH mode selector
OMRON XG4E-3031
Connector
Warning indicator
Teaching indicator
Power indicator
Teaching button
RUN/TEACH mode selector
Warning indicator
Teaching indicator
Power indicator
Two, M4
Mounting Dimensions
Two, M4
Mounting Dimensions
(6.30)
(6.30)
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