High Performance Bi-Directional
Digital MEMS Gas Flow Sensor
MFC2000 Series
FEATURES
Bi-directional flow (±30 or ±70SLM)
High dynamic range
±3% m.v. accuracy
±0.8% m.v. repeatability
Low power consumption
Fast response time
Single 2.7 - 5.5Vdc power supply
Digital I
2
C output
Standard push-in fitting sizes
Custom fluid connector available
Temperature compensated
Highly configurable firmware
Easy-to-use PC-based GUI
RoHS and WEEE compliant
APPLICATIONS
Medical gas flow measurement and control
Industrial gas flow measurement and control
Consumer products
MFC2030
±
30 SLM version.
externally powered, up to 5.5V (3.3V typ.). I
2
C digital
output is standard. Other output available upon
request.
The MFC2000 series includes firmware that is highly
configurable, offering the user a variety of settings that
can be tailored to specific applications. This includes
data output type, calibration settings, measurement
modes, and power consumption. A user-friendly PC-
based application offers the user a variety of data
collection options, including real-time graphical
display. Mechanically, the unit includes fittings that
can accept a variety of standard inlet tube sizes.
MFC2000 series is a true thermal mass flow sensing
module, and can easily be configured to suit a variety
of applications, from medical flow to industrial
processing. Customized versions, including customer
specific bulk channel and mounting options are
available.
For more information, please contact ACEINNA at
info@ACEINNA.com.
ACEINNA,
Inc.
DESCRIPTION
MFC2000 series is a new gas flow sensing module
platform based on ACEINNA’s proprietary CMOS
technology for thermal mass flow sensing. It can
measure up to 70 SLM bi-directional flow rate with +/-
3.0% accuracy.
The sensing element is monolithically integrated with
CMOS signal processing circuitry and embedded
software capable of converting gas flow rates to a
digital output with very high repeatability. The module
has very low operating power consumption (< 5 mA)
and a low power consumption sleep mode (<100 µA)
for optimal power management in portable
applications. The MFC2000 series is
Information furnished by ACEINNA is believed to be accurate and reliable. However, no
responsibility is assumed by ACEINNA for its use, or for any infringements of patents or
other rights of third parties, which may result from its use. No license is granted by
implication or otherwise under any patent or patent rights of ACEINNA.
One Technology Drive, Suite 325, Andover, MA 01810, USA
Tel: +1 978 738 0900
Fax: +1 978 738 0196
www.ACEINNA.com
ACEINNA MFC2030 v1.05
Page 1 of 8
CONFIDENTIAL
SENSOR CHARACTERISTICS
(Measurements
performed with air at 23C temperature, 1 Atm pressure, 50% RH, at 5.0V DC power supply,
unless otherwise specified). Calibration conditions for standard liters per minute slm: 20°C, 1013mbar.
Parameter
Measurement Range
Flow Direction
Supply DC Voltage
(VDD)
Interface Voltage
1
(VDDIO)
Output Range
Operating Temperature
Calibrated Temperature
Storage Temperature
Relative Humidity
Supply Current
3
Accuracy
4
Condition
Straight/Manifold Mounting
30 SLM
70 SLM
Unit
SLM
N/A
Vdc
V
LSB
+/- 30
+/- 70
Bi-directional
2.7 – 5.5
(See note 1)
I2C Mode
2
2.7 – 3.0
0 – 65,535
(20) – 80
0 – 50
(40) – 85
0 – 95
5
100
3.0
0.03
0.8
0.08
0.3
0.03
25
8
2
3.5
Repeatability
5
RMS Noise at Zero Flow
Offset Shift w/Temp.
Total Error Band
4
Pressure Drop
Sample Rate
Orientation Sensitivity
Wake Time
Working Pressure
Module Weight
Wetted Material
C
C
C
non-condensing
%
Operating mode
mA
Sleep mode
µA
0.01Q
max
≤ Q < Q
max
% m.v.
Q < 0.01Q
max
% F.S.
0.1Q
max
≤ Q ≤ Q
max
% m.v.
ODR =
100Hz
Q < 0.1Q
max
% F.S.
0.1Q
max
≤ Q ≤ Q
max
% m.v.
ODR =
10Hz
Q < 0.1Q
max
% F.S.
ODR = 100Hz
sccm
ODR = 10Hz
sccm
0 - 50C
SCCM/C
% m.v.
0 - 50C, 0.1Qmax ≤ Q ≤ Q
max
Q
max
4
18
mbar
10
msec
< 60
sccm
Wake up from sleep mode
40
msec
0-8
Bar
Includes aluminum inserts
< 100
g
Si, SiO
2
, Si
3
N
4
, Aluminum, PPSU, Stainless steel, Viton, Nitrile rubber,
Aluminum alloy 3003, Epoxy, Silicone
Note 1: VDDIO is generated internally and should be used to set the logic high voltage for I
2
C interface. VDDIO can
supply a current up to 100 mA.
Note 2: Use two’s complement as binary signed number representation.
Note 3: Power consumption can be optimized using “Power-Cycle” configuration to program the wake and sleep
duration.
Note 4: Accuracy is defined as the sum of all dc errors (linearity) at 23C. Error Band is defined as the sum of
accuracy and offset/span due to temperature. Both are measured after factory calibration, using internal
averaging (100x) to eliminate errors due to noise. If the end application requires a high Output Data Rate
(ODR), and cannot benefit from averaging, the total RMS error of any given measurement can be
calculated by adding the repeatability specification.
Note 5: Repeatability is defined as standard deviation divided by mean flow (% m.v.), or standard deviation divided
by F.S. (% F.S.). Average/ODR is programmable.
ACEINNA MFC2030 v1.10
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CONFIDENTIAL
ABSOLUTE MAXIMUM RATINGS*
Supply Voltage (V
DD
) ……….…………... 2.7 to +5.5V
Storage Temperature ……...….……..-40C to +85C
Pressure ……….……………………..0 - 8 Bar Gauge
Shock ……………………..….………… 10g, 0.5ms
Vibration ………………..……………. 1g, 5 to 200 Hz
ESD ...…………….. 4kV/8kV (contact/air discharge)
.
Note:
Stresses above those listed under Absolute Maximum
Ratings may cause permanent damage to the device. This
is a stress rating only; the functional operation of the device
at these or any other conditions above those indicated in the
operational sections of this specification is not implied.
Exposure to absolute maximum rating conditions for
extended periods may affect the device’s reliability
.
THEORY OF OPERATION
The flow rate is detected by the MEMS thermal mass
flow sensor. The sensor chip, produced in ACEINNA
proprietary CMOS compatible technology, is
composed of a central heater source (micro heater)
and two temperature sensors (thermopiles), which are
placed symmetrically upstream and downstream of
the micro-heater. If no gas flows over the sensor
surface, the symmetric thermopiles measure the same
rise in temperature, resulting in the same output
voltage of the two thermopiles. If a non-zero gas flows
from the inlet to the outlet of the meter, the velocity of
a fully-developed laminar air flow unbalances the
temperature profile around the heater and heat is
transferred from upstream thermopiles to the
downstream thermopiles, causing a change in the
voltages of the thermopiles. Larger gas flow rates
result in larger asymmetry in the profile.
CONFIGURATION AND MARKING
Pinout Configuration:
MFC2030 pin configuration.
Pin
1
2
3
4
5
6
7
8
Name
VDD
VDDIO
SCL
SDA
GND
GND
GND
NC
Description
Power Supply
I/O Voltage Reference
Serial Clock Line for I
2
C bus
Serial Data Line for I
2
C bus
Connect to Ground
Connect to Ground
Connect to Ground
Not Connected
Zero gas flow.
Marking Illustration:
Line 1: The arrow sign of ACEINNA Logo denotes the
positive direction of flow
Line 2: Model name
Line 3: Barcode (shown below as a space)
Line 4: Lot number
Non-zero gas flow.
Temp. profiles vs. distances/gas velocities.
ACEINNA MFC2030 v1.10
Page 3 of 8
CONFIDENTIAL
PACKAGE DRAWING
The ACEINNA MFC2000 series Mass Flow Meter is mounted in chemically inert filled PPSU housing (available in
other material, see “Order Information”). The physical dimensions, mounting information and pin layout are provided
below. A push-in tube fitting or a PPSU flange (manifold mounting) is provided on inlet and outlet sides of the module
for flow connection. For electrical connection, an 8-pin male header (FCI 69168-108HLF) is provided on the topside
of the module for I
2
C interface connection. The recommended mechanical/electrical connectors are shown as
follows. The unit can be printed circuit board mounted is needed.
Recommended Connector
Flow Fitting
Electrical
Push-in connector included
8 pin crimp to wire housing
(2.54mm pitch, 2 rows, 2.54mm
row space)
Example
See “Ordering Information”
FCI 65846-016LF
MFC2000 module mechanical dimensions (in mm).
ACEINNA MFC2030 v1.10
Page 4 of 8
CONFIDENTIAL
MFC2030 I2C Communication
MFC2030 Pin Configuration
Figure.1 MFC2030 Pin Configuration
Table.1 MFC2030 Pin Configuration
Name
Description
VDD
SCL
SDA
GND
GND
GND
Power Supply
NA
Serial Clock Line for I
2
C bus
Serial Data Line for I
2
C bus
Connect to Ground
Connect to Ground
Connect to Ground
NA
Pin
1
2
3
4
5
6
7
8
2. Hardware Connection
SCL and SDA pins must be connected with around 4.7k Ohm pull-up resistors to VDD, recommending voltage is 5V
+/- 10%.
Figure.2 Pull-up Resistors Connection
3. I2C Read and Write Timing
I2C communication using standard I2C protocol, as shown below, recommending SCL frequency about 100kHz.
ACEINNA MFC2030 v1.10
Page 5 of 8
CONFIDENTIAL
