MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX7200/D
200 kPa
High Zin, On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
MPX7200
SERIES
Motorola Preferred Device
The new MPX7200 series pressure sensor incorporates all the innovative features of
Motorola’s MPX2000 series family including the patented, single piezoresistive strain
gauge (X–ducer) and on–chip temperature compensation and calibration. In addition, the
MPX7200 series has a high input impedance of typically 10 kΩ for those portable, low
power and battery–operated applications. This device is suitable for those systems in
which users must have a dependable, accurate pressure sensor that will not consume
significant power. The MPX7200 series device is a logical and economical choice for
applications such as portable medical instrumentation, remote sensing systems with
4 – 20 mAmp transmission and field barometers/altimeters.
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
Features
•
Temperature Compensated Over 0°C to +85°C
•
Unique Silicon Shear Stress Strain Gauge
•
Easy to Use Chip Carrier Package Options
•
Available in Absolute, Differential and Gauge Configurations
•
Ratiometric to Supply Voltage
• ±
0.25% Linearity (MPX7200D)
Application Examples
•
Portable Medical Instrumentation
•
Field Altimeters
•
Field Barometers
Figure 1 illustrates a schematic of the internal circuitry on the stand–alone pressure
sensor chip.
VS
3
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
BASIC CHIP
CARRIER ELEMENT
CASE 344–15, STYLE 1
DIFFERENTIAL
PORT OPTION
CASE 344C–01, STYLE 1
NOTE: Pin 1 is the notched pin.
HIGH
Zin
X–ducer
SENSING
ELEMENT
2
4
Vout+
Vout–
PIN NUMBER
1
2
Gnd
+Vout
3
4
VS
–Vout
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the X–ducer is directly proportional to the differential
pressure applied.
The absolute sensor has a built–in reference vacuum. The output voltage will decrease
as vacuum, relative to ambient, is drawn on the pressure (P1) side.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure (P1) side relative to the vacuum (P2) side. Similarly,
output voltage increases as increasing vacuum is applied to the vacuum (P2) side
relative to the pressure (P1) side.
Preferred
devices are Motorola recommended choices for future use and best overall value.
Senseon and X–ducer are trademarks of Motorola, Inc.
REV 3
Motorola Sensor Device Data
©
Motorola, Inc. 1997
1
MPX7200 SERIES
MAXIMUM RATINGS
Rating
Overpressure(8) (P1 > P2)
Burst Pressure(8) (P1 > P2)
Storage Temperature
Operating Temperature
Symbol
Pmax
Pburst
Tstg
TA
Value
400
2000
– 40 to +125
– 40 to +125
Unit
kPa
kPa
°C
°C
OPERATING CHARACTERISTICS
(VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range(1)
Supply Voltage(2)
Supply Current
Full Scale Span(3)
Offset(4)
Sensitivity
Linearity(5)
Pressure Hysteresis(5) (0 to 200 kPa)
Temperature Hysteresis(5) (– 40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Input Impedance
Output Impedance
Response Time(6)
Warm–Up
Offset Stability(9)
MPX7200D
MPX7200A
MPX7200A, MPX7200D
MPX7200D
MPX7200A
Symbol
POP
VS
Io
VFSS
Voff
∆V/∆P
—
—
—
—
TCVFSS
TCVoff
Zin
Zout
tR
—
—
Min
0
—
—
38.5
–1.0
– 2.0
—
– 0.25
– 1.0
—
—
–1.0
–1.0
5000
2500
—
—
—
Typ
—
10
1.0
40
—
—
0.2
—
—
±
0.1
±
0.5
—
—
—
—
1.0
20
±
0.5
Max
200
16
—
41.5
1.0
2.0
—
0.25
1.0
—
—
1.0
1.0
15,000
6000
—
—
—
Unit
kPa
Vdc
mAdc
mV
mV
mV/kPa
%VFSS
%VFSS
%VFSS
%VFSS
mV
Ω
Ω
ms
ms
%VFSS
MECHANICAL CHARACTERISTICS
Characteristic
Weight (Basic Element Case 344–15)
Common Mode Line Pressure(7)
Symbol
—
—
Min
—
—
Typ
2.0
—
Max
—
690
Unit
Grams
kPa
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
•
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
•
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
•
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
•
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
•
TcOffset:
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Common mode pressures beyond specified may result in leakage at the case–to–lead interface.
8. Exposure beyond these limits may cause permanent damage or degradation to the device.
9. Offset stability is the product’s output deviation when subjected 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2
Motorola Sensor Device Data
MPX7200 SERIES
LINEARITY
Linearity refers to how well a transducer’s output follows
the equation: Vout = Voff + sensitivity x P over the operating
pressure range. There are two basic methods for calculating
nonlinearity: (1) end point straight line fit (see Figure 2) or (2)
a least squares best line fit. While a least squares fit gives
the “best case” linearity error (lower numerical value), the
calculations required are burdensome.
Conversely, an end point fit will give the “worst case” error
(often more desirable in error budget calculations) and the
calculations are more straightforward for the user. Motorola’s
specified pressure sensor linearities are based on the end
point straight line method measured at the midrange pres-
sure.
LEAST SQUARES FIT
RELATIVE VOLTAGE OUTPUT
EXAGGERATED
PERFORMANCE
CURVE
LEAST
SQUARE
DEVIATION
STRAIGHT LINE
DEVIATION
END POINT
STRAIGHT LINE FIT
OFFSET
0
50
PRESSURE (% FULLSCALE)
100
Figure 2. Linearity Specification Comparison
ON–CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the output characteristics of the MPX7200
series at 25°C. The output is directly proportional to the dif-
ferential pressure and is essentially a straight line.
The effects of temperature on Full Scale Span and Offset
are very small and are shown under Operating Characteris-
tics.
40
35
OUTPUT (mVdc)
30
25
20
15
10
5
0
–5
kPa 0
PSI
VS = 10 Vdc
TA = 25°C
P1 > P2
MAX
TYP
SPAN
RANGE
(TYP)
MIN
25
50
7.25
75
125
100
14.5
PRESSURE
150
21.75
175
200
29
OFFSET
Figure 3. Output versus Pressure Differential
SILICONE GEL
DIE COAT
WIRE BOND
WIRE BOND
LEAD FRAME
DIFFERENTIAL/GAUGE ELEMENT
P2
DIE
BOND
LEAD FRAME
Figure 4. Cross–Sectional Diagrams (Not to Scale)
Figure 4 illustrates the absolute sensing configuration (right)
and the differential or gauge configuration in the basic chip
carrier (Case 344–15). A silicone gel isolates the die surface
and wire bonds from the environment, while allowing the pres-
sure signal to be transmitted to the silicon diaphragm.
The MPX7200 series pressure sensor operating charac-
teristics and internal reliability and qualification tests are
based on use of dry air as the pressure media. Media other
than dry air may have adverse effects on sensor perfor-
mance and long term reliability. Contact the factory for in-
formation regarding media compatibility in your application.
Motorola Sensor Device Data
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ABSOLUTE ELEMENT
P2
DIFFERENTIAL/GAUGE
STAINLESS STEEL
DIE
METAL COVER
P1
EPOXY
CASE
SILICONE GEL ABSOLUTE
DIE COAT
DIE
P1
STAINLESS STEEL
METAL COVER
EPOXY
CASE
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
ÉÉÉÉÉÉÉÉÉÉÉ
DIE
BOND
3
MPX7200 SERIES
PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE
Motorola designates the two sides of the pressure sensor
as the Pressure (P1) side and the Vacuum (P2) side. The
Pressure (P1) side is the side containing the silicone gel
which isolates the die from the environment. The differential
and gauge sensor is designed to operate with positive differ-
Part Number
MPX7200A
MPX7200DP
MPX7200AP
MPX7200GVP
MPX7200AS
MPX7200ASX
MPX7200GVSX
MPX7200GSX
MPX7200GP
MPX7200D
ential pressure applied, P1 > P2. The absolute sensor is de-
signed for vacuum applied to P1 side.
The Pressure (P1) side may be identified by using the
table below:
Case Type
344–15C
344C–01
344B–01
344D–01
344E–01
344F–01
344G–01
Pressure Side (P1) Identifier
Stainless Steel Cap
Side with Part Marking
Side with Port Attached
Stainless Steel Cap
Side with Port Attached
Side with Port Attached
Stainless Steel Cap
ORDERING INFORMATION
MPX7200 series pressure sensors are available in absolute, differential and gauge configurations. Devices are available in
the basic element package or with pressure port fittings which provide printed circuit board mounting ease and barbed hose
pressure connections.
MPX Series
Device Type
D i T
Basic Element
Ported Elements
Options
O i
Absolute, Differential
Differential
Absolute, Gauge
Gauge Vacuum
Absolute, Stove Pipe
Absolute, Gauge Axial
Gauge Vacuum Axial
Case Type
C
T
Case 344–15
Case 344C–01
Case 344B–01
Case 344D–01
Case 344E–01
Case 344F–01
Case 344G–01
Order Number
MPX7200A
MPX7200D
MPX7200DP
MPX7200AP
MPX7200D
MPX7200GVP
MPX7200AS
MPX7200ASX
MPX7200GSX
MPX7200GVSX
Device Marking
MPX7200A
MPX7200D
MPX7200DP
MPX7200AP
MPX7200GP
MPX7200GVP
MPX7200A
MPX7200A
MPX7200D
MPX7200D
4
Motorola Sensor Device Data
MPX7200 SERIES
PACKAGE DIMENSIONS
NOTES:
C
R
M
B
–A–
N
PIN 1
1
2
3
4
POSITIVE
PRESSURE (P1)
1. DIMENSIONING AND TOLERANCING PER ASME
Y14.5M, 1994.
2. CONTROLLING DIMENSION: INCH.
3. DIMENSION –A– IS INCLUSIVE OF THE MOLD
STOP RING. MOLD STOP RING NOT TO EXCEED
16.00 (0.630).
INCHES
MIN
MAX
0.595
0.630
0.514
0.534
0.200
0.220
0.016
0.020
0.048
0.064
0.100 BSC
0.014
0.016
0.695
0.725
30
_
NOM
0.475
0.495
0.430
0.450
MILLIMETERS
MIN
MAX
15.11
16.00
13.06
13.56
5.08
5.59
0.41
0.51
1.22
1.63
2.54 BSC
0.36
0.40
17.65
18.42
30
_
NOM
12.07
12.57
10.92
11.43
L
–T–
J
SEATING
PLANE
POSITIVE
PRESSURE
(P1)
G
F
4 PL
D
0.136 (0.005)
M
T A
M
DIM
A
B
C
D
F
G
J
L
M
N
R
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344–15
ISSUE W
SEATING
PLANE
–T–
R
H
N
PORT #1
POSITIVE
PRESSURE
(P1)
–A–
U
L
NOTES:
1. DIMENSIONING AND TOLERANCING PER ANSI
Y14.5, 1982.
2. CONTROLLING DIMENSION: INCH.
INCHES
MIN
MAX
1.145
1.175
0.685
0.715
0.305
0.325
0.016
0.020
0.048
0.064
0.100 BSC
0.182
0.194
0.014
0.016
0.695
0.725
0.290
0.300
0.420
0.440
0.153
0.159
0.153
0.159
0.230
0.250
0.220
0.240
0.910 BSC
MILLIMETERS
MIN
MAX
29.08
29.85
17.40
18.16
7.75
8.26
0.41
0.51
1.22
1.63
2.54 BSC
4.62
4.93
0.36
0.41
17.65
18.42
7.37
7.62
10.67
11.18
3.89
4.04
3.89
4.04
5.84
6.35
5.59
6.10
23.11 BSC
–Q–
B
1 2
3 4
PIN 1
K
S
F
G
D
4 PL
0.13 (0.005)
–P–
0.25 (0.010)
J
C
M
T Q
S
DIM
A
B
C
D
F
G
H
J
K
L
N
P
Q
R
S
U
M
T S
S
Q
S
STYLE 1:
PIN 1.
2.
3.
4.
GROUND
+ OUTPUT
+ SUPPLY
– OUTPUT
CASE 344B–01
ISSUE B
Motorola Sensor Device Data
5
