Freescale Semiconductor
Technical Data
MPXAZ6115A
Rev 4, 01/2007
Media Resistant and
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The MPXAZ6115A series sensor integrates on-chip, bipolar op amp circuitry
and thin film resistor networks to provide a high output signal and temperature
compensation. The sensor's packaging has been designed to provide resistance
to high humidity conditions as well as common automotive media. The small form
factor and high reliability of on-chip integration make the Freescale
Semiconductor, Inc. pressure sensor a logical and economical choice for the
system designer.
The MPXAZ6115A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1
shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
• Resistant to High Humidity and Common Automotive Media
• Improved Accuracy at High Temperature
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Temperature Compensated from -40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
Typical Applications
• Aviation Altimeters
• Industrial Controls
• Engine Control/Manifold Absolute Pressure (MAP)
• Weather Station and Weather Reporting Devices
ORDERING INFORMATION
Device
Type
Basic
Element
Ported
Element
MPXAZ6115A
MPXHZ6115A
SERIES
INTEGRATED
PRESSURE SENSOR
15 TO 115 kPA (2.2 TO 16.7 psi)
0.2 TO 4.8 V OUTPUT
SMALL OUTLINE PACKAGE
MPXAZ6115A6U
CASE 482-01
MPXAZ6115AC6U
CASE 482A-01
MPXAZ6115AP
CASE 1369-01
SMALL OUTLINE PACKAGE
PIN NUMBERS
(1)
1
2
3
4
N/C
V
S
GND
V
OUT
5
6
7
8
N/C
N/C
N/C
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is denoted by the
notch in the lead.
SUPER SMALL OUTLINE PACKAGE
Options
Case
No.
482
482
482A
482A
1369
1369
MPX Series
Order No.
MPXAZ6115A6U
MPXAZ6115A6T1
MPXAZ6115AC6U
MPXAZ6115AC6T1
MPXAZ6115AP
MPXAZ6115APT1
Packing
Options
Rails
Device
Marking
MPXAZ6115A
SMALL OUTLINE PACKAGE
Absolute, Element Only
Absolute, Element Only
Absolute, Axial Port
Absolute, Axial Port
Absolute, Side Port
Absolute, Side Port
SUPER SMALL OUTLINE PACKAGE
Basic
Element
Ported
Element
Absolute, Element Only
Absolute, Element Only
Absolute, Axial Port
Absolute, Axial Port
1317
1317
MPXHZ6115A6U
MPXHZ6115A6T1
Rails
MPXHZ6115A
MPXHZ6115A6U
CASE 1317-04
MPXHZ6115AC6U
CASE 1317A-03
Tape & Reel MPXAZ6115A
Rails
MPXAZ6115A
SMALL OUTLINE PACKAGE
PIN NUMBERS
(1)
1
2
3
4
N/C
V
S
GND
V
OUT
5
6
7
8
N/C
N/C
N/C
N/C
Tape & Reel MPXAZ6115A
Tray
MPXAZ6115A
Tape & Reel MPXAZ6115A
Tape & Reel MPXHZ6115A
Rails
MPXHZ6115A
1317A MPXHZ6115AC6U
1317A MPXHZ6115AC6T1 Tape & Reel MPXHZ6115A
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is denoted by the
notch in the lead.
© Freescale Semiconductor, Inc., 2007. All rights reserved.
V
S
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and Ground
Reference
Shift
Circuitry
V
OUT
GND
Pins 1, 5, 6, 7, and 8 are No Connects
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings
(1)
Rating
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Output Source Current @ Full Scale Output
(2)
Output Sink Current @ Minimum Pressure Offset
(2)
Symbol
P
max
T
stg
T
A
I
o
+
I
o
-
Value
400
-40° to +125°
-40° to +125°
0.5
-0.5
Units
kPa
°C
°C
mAdc
mAdc
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from V
out
to Gnd or V
out
to V
S
in the application circuit.
MPXAZ6115A
2
Sensors
Freescale Semiconductor
Table 2. Operating Characteristics
(V
S
= 5.0 Vdc, T
A
= 25°C unless otherwise noted, P1 > P2)
Characteristic
Pressure Range
Supply Voltage
(1)
Supply Current
Minimum Pressure Offset
(2)
@ V
S
= 5.0 Volts
Full Scale Output
(3)
@ V
S
= 5.0 Volts
Full Scale Span
(4)
@ V
S
= 5.0 Volts
Accuracy
(5)
Sensitivity
Response Time
(6)
Warm-Up Time
(7)
Offset Stability
(8)
1. Device is ratiometric within this specified excitation range.
2. Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
3. Full Scale Output (V
FSO
) is defined as the output voltage at the maximum or full rated pressure.
4. Full Scale Span (V
FSS
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span
at 25°C due to all sources of error including the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
• TcSpan:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
• TcOffset:
Output deviation with minimum pressure applied, over the temperature range of 0° to 85°C, relative to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
8. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
(0 to 85°C)
Symbol
P
OP
V
S
I
o
V
off
Min
15
4.75
—
0.133
Typ
—
5.0
6.0
0.200
Max
115
5.25
10
0.268
Unit
kPa
Vdc
mAdc
Vdc
(0 to 85°C)
V
FSO
4.633
4.700
4.768
Vdc
(0 to 85°C)
V
FSS
4.433
4.500
4.568
Vdc
(0 to 85°C)
—
V/P
t
R
—
—
—
—
—
—
—
—
45.9
1.0
20
±0.25
±1.5
—
—
—
—
%V
FSS
mV/kPa
ms
ms
%V
FSS
MPXAZ6115A
Sensors
Freescale Semiconductor
3
.
+5.0 V
Die
Wire Bond
Lead
Frame
GND Pin 3
Absolute Element
Sealed Vacuum Reference
Die Bond
P1
Stainless
Steel Cap
Thermoplastic
Case
V
S
Pin 2
100 nF
MPXA6115A
V
out
Pin 4
47 pF
51 K
to ADC
Fluoro Silicone
Gel Die Coat
Figure 2. Cross Sectional Diagram SOP (Not to Scale)
Figure 3. Typical Application Circuit
(Output Source Current Operation)
5.0
4.5
4.0
3.5
Output (Volts)
3.0
2.5
2.0
1.5
1.0
0.5
0
Transfer Function:
V
out
= V
s
* (.009*P-.095) ± Error
V
S
= 5.0 Vdc
TEMP = 0 to 85ºC
MAX
TYP
MIN
Figure 4. Output versus Absolute Pressure
Figure 4
shows the sensor output signal relative to
pressure input. Typical minimum and maximum output
curves are shown for operation over 0 to 85°C temperature
range. The output will saturate outside of the rated pressure
range.
A gel die coat isolates the die surface and wire bonds from
the environment, while allowing the pressure signal to be
transmitted to the sensor diaphragm. The gel die coat and
durable polymer package provide a media resistant barrier
that allows the sensor to operate reliably in high humidity
conditions as well as environments containing common
automotive media. Contact the factory for more information
regarding media compatibility in your specific application.
MPXAZ6115A
4
Sensors
Freescale Semiconductor
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
105
110
115
120
Pressure (ref: to sealed vacuum) in kPa
Transfer Function (MPXAZ6115A
Nominal Transfer Value:
V
out
= V
S
x (0.009 x P - 0.095)
±
(Pressure Error x Temp. Factor x 0.009 x V
S
)
V
S
= 5.0
±
0.25 Vdc
Temperature Error Band
4.0
3.0
Temperature
Error
Factor
2.0
1.0
0.0
-40
-20
0
20
MPXAZ6115A Series
Break Points
Temp
-
40
0 to 85
125
Multiplier
3
1
1.75
40
60
80
100
120
140
Temperature in Cº
NOTE: The Temperature Multiplier is a linear response from 0ºC to -40ºC and from 85ºC to 125ºC
Pressure Error Band
3.0
2.0
Pressure Error (kPa)
1.0
0.0
-1.0
-2.0
-3.0
Pressure
15 to 115 (kPa)
Error (Max)
±1.5 (kPa)
20
40
60
80
100
120
Pressure (in kPa)
Error Limits for Pressure
MPXAZ6115A
Sensors
Freescale Semiconductor
5
stm32/stm8
