All parameters are measured at 5.000V supply at room temperature, unless otherwise specified.
Min
Excitation Voltage
Excitation Current
Span (FS Range)
5 psi
15 psi
30 psi
60 psi
100 psi
300 psi
Offset
TC Span
TC Offset
TC Resistance
Linearity
Bridge Impedance
Proof Pressure
Burst Pressure
Operating Temperature
Storage Temperature
0
0
75
115
130
130
130
130
-50
-24
-7
24
-0.3
2.70
3X
5X
-40
-55
Typ
5
1.5
100
145
165
180
200
220
0
-19
-1
27.5
±0.05
3.15
Max
10
3
125
175
195
220
250
275
50
-15.5
+7
33
0.3
4.00
125
150
Units
V
mA
mV
mV
mV
mV
mV
mV
mV
o
%FS/100 C
o
%FS/100 C
o
%/100 C
%FS
kohm
Rated FS
Rated FS
o
C
o
C
1.80 mm
Notes
1
2
3
4
Notes:
1.
Bridge may be driven with positive or negative voltage
as long as Vsub is not connected. Positive output for positive pressure
applied to circuit side of die when bridge is driven with positive voltage.
2.
Measured at 5V constant voltage excitation.
3.
Measured from 0 to 70 C
4.
Defined as best straight line.
+V exc.
+ Sig
1.80 mm
1.38 mm
-V exc.
Vsub
Pad size =
0.12 X 0.12 mm
-V exc.
-Sig
Positive output for pressure
applied to the top (circuit)
side of the sensor
ORDERING INFORMATION:
Model Number
Die dimensions in mm
2.00 mm
SM5102 die (2 mm square as sawn).
Covered under USA Mask-Copyright and may be covered
under US Patent Numbers 5,812,047 and 6,089,099
See separate Application Notes for typical range of variation in Saw
dimensions.
Pressure Ranges
PSI
5102
5
005
15
015
30
030
60
060
100
100
300
300
Custom ranges available in high volumes
Pressure Type
A: Absolute
G: Gage
SM5102- 015 - A
Pressure
range
Pressure
Type
Notice:
Silicon Microstructures, Inc. reserves the right to make changes to the product contained in this publication. Silicon Microstructures, Inc. assumes no responsibility for the use of any
circuits described herein, conveys no license under any patent or other right, and makes no representation that the circuits are free of patent infringement. While the information in this
publication has been checked, no responsibility, however, is assumed for inaccuracies.
Silicon Microstructures, Inc. does not recommend the use of any of its products in life support applications where the failure or malfunction of the product can reasonably be expected to
cause failure of a life-support system or to significantly affect its safety or effectiveness. Products are not authorized for use in such applications.
