Integration of displacement sensor into bulk PZT thick film actuator for MEMS deformable mirror

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Sensors and Actuators A 147 2008 242247 Contents lists available at ScienceDirect Sensors and Actuators A Physical j o u r n a l h o m e p a g e w w w e l s e v i e r c o m l o c a t e s n a Integration of displacement sensor into bulk PZT thick lm actuator for MEMS deformable mirror XiaoHui Xu Yan Feng BaoQing Li JiaRu Chu Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei Anhui 230026 China a r t i c l e i n f o a b s t r a ......