讨论了金属氧化物半导体表面的气2气、气2固反应及其相应的电子过程, 建立了分析气敏作用机理的理论模型, 并提出了改进传感器性能的指导性意见。关键词: 气敏传感器; 金属氧化物半导体; 晶粒势垒Abstract: The react ion s of gas2gas and gas2so lid on the su rface ofm etal2ox ide sem iconduc2 to r and react ive elect ron ic p rocesses are discu ssed in th is paper. A lso, the theo ret icalmodel fo r analysiing gas sen sit ivem echan ism is estab lished, and som e gu iding suggest ion s fo r im2 p roving perfoum ances of gas sen so r are p rovided in th is paper.Key words: gas sen so r; m etal2ox ide sem iconducto r; grain boundary