题目：A Chopper Current-Feedback Instrumentation Amplifier with a 1mHz 1/ƒ Noise Corner and an AC-Coupled Ripple-Reduction Loop

作者：Rong Wu, Kofi A.A. Makinwa, Johan H. Huijsing

摘要：In the precision mechatronics of wafer steppers, thermal expansion is an important source of error. To compensate for this, the temperature of critical mechanical components must be measured with high resolution (<1μK), typically by using precision thermistor bridges. Furthermore, this resolution must be maintained over several minutes, which means that the amplifier used for bridge readout should have a 1/f noise corner of only a few mHz. Such noise performance is well beyond the capabilities of currently available CMOS amplifiers [1-3].