Freescale Semiconductor
Data Sheet: Technical Data
Document Number: MPXA6115A
Rev. 7.3, 04/2015
MPXxx6115A, 15 to 115 kPa, Absolute,
Integrated Pressure Sensor
The MPXxx6115A series sensor integrates on-chip, bipolar op amp circuitry and
thin film resistor networks to provide a high output signal and temperature
compensation. The small form factor and high reliability of on-chip integration make
the pressure sensor a logical and economical choice for the system designer.
The MPXxx6115A series piezoresistive transducer is a state-of-the-art, monolithic,
signal conditioned, silicon pressure sensor. This sensor combines advanced
micromachining techniques, thin film metallization, and bipolar semiconductor
processing to provide an accurate, high level analog output signal that is
proportional to applied pressure.
MPXA6115A
MPXAZ6115A
MPXH6115A
MPXHZ6115A
Series
Top view
Features
•
•
•
•
•
•
•
•
•
•
Resistant to high humidity and common automotive media
Improved accuracy at high temperature
Available in small and super small outline packages
1.5% maximum error over 0 °C to 85 °C
Ideally suited for microprocessor or microcontroller-based systems
Temperature compensated from -40 °C to +125 °C
Durable Thermoplastic (PPS) Surface Mount Package
Industrial controls
Engine control/manifold absolute pressure (MAP)
Weather station and weather reporting device barometers
Pin 1 identification
chamfered corner
or notch in pin
DNC
DNC
DNC
DNC
5
6
7
8
4
3
2
1
V
OUT
GND
V
S
DNC
Typical applications
Pinout
Small outline packages
MPXA6115A6U/T1
Case 98ASB17756C
MPXA6115AC6U/T1
MPXAZ6115AC6T1
Case 98ASB17757C
MPXA6115AC7U
Case 98ASB17759C
MPXAZ6115AP/T1
Case 98ASA99303D
Super small outline packages
MPXH6115A6U/T1
MPXHZ6115A6U/T1
Case 98ARH99066A
MPXH6115AC6U/T1
MPXHZ6115AC6U/T1
Case 98ARH99089A
Freescale reserves the right to change the detail specifications as may be required to permit
improvements in the design of its products.
© 2007-2012, 2015 Freescale Semiconductor, Inc. All rights reserved.
Ordering information
# of Ports
Device name
Shipping
Package
None
Small outline package (MPXA6115A series)
MPXA6115A6U
MPXA6115A6T1
MPXA6115AC6U
MPXA6115AC6T1
MPXA6115AC7U
Rails
Tape and Reel
Rails
Tape and Reel
Rails
98ASB17756C
98ASB17756C
98ASB17757C
98ASB17757C
98ASB17759C
•
•
•
•
•
•
•
•
•
•
MPXA6115A
MPXA6115A
MPXA6115A
MPXA6115A
MPXA6115A
Single
Dual
Gauge
Differential
Absolute
Pressure type
Device
marking
Small outline package (Media resistant gel) (MPXAZ6115A series)
MPXAZ6115AC6T1
MPXAZ6115AP
MPXAZ6115APT1
Tape and Reel
Trays
Tape and Reel
98ASB17757C
98ASA99303D
98ASA99303D
•
•
•
•
•
•
MPXAZ6115A
MPXAZ6115A
MPXAZ6115A
Super small outline package (MPXH6115A series)
MPXH6115A6U
MPXH6115A6T1
MPXH6115AC6U
MPXH6115AC6T1
Rails
Tape and Reel
Rails
Tape and Reel
98ARH99066A
98ARH99066A
98ARH99089A
98ARH99089A
•
•
•
•
•
•
•
•
MPXH6115A
MPXH6115A
MPXH6115A
MPXH6115A
Small outline package (Media resistant gel) (MPXHZ6115A series)
MPXHZ6115A6U
MPXHZ6115A6T1
MPXHZ6115AC6U
MPXHZ6115AC6T1
Rails
Tape and Reel
Rails
Tape and Reel
98ARH99066A
98ARH99066A
98ARH99089A
98ARH99089A
•
•
•
•
•
•
•
•
MPXHZ6115A
MPXHZ6115A
MPXHZ6115A
MPXHZ6115A
MPXA6115A
2
Sensors
Freescale Semiconductor, Inc.
Contents
1
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.1 Block diagram . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
1.2 Pinout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Mechanical and Electrical Specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.1 Maximum ratings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
2.2 Operating characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
On-chip Temperature Compensation and Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Package Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.1 Minimum recommended footprint for small and super small packages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
4.2 Package dimensions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Revision History . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2
3
4
5
Related Documentation
The MPXxx6115A device features and operations are described in a variety of reference manuals, user guides, and application
notes. To find the most-current versions of these documents:
1.
2.
3.
Go to the Freescale homepage at:
http://www.freescale.com/
In the Keyword search box at the top of the page, enter the device number MPXxx6115A.
In the Refine Your Result pane on the left, click on the Documentation link.
MPXA6115A
Sensors
Freescale Semiconductor, Inc.
3
1
1.1
General Description
Block diagram
Figure 1
shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
+5.0 V
V
S
Pin 2
100 nF
MPXxx6115A
V
OUT
Pin 4
GND Pin 3
47 pF
51 K
to ADC
Figure 1. Fully integrated pressure sensor schematic
1.2
Pinout
DNC
DNC
DNC
DNC
5
6
7
8
4
3
2
1
V
OUT
GND
V
S
DNC
Pin 1 identification, chamfered corner or notch in pin
Figure 2. Device pinout (top view)
Table 1. Pin functions
Pin
1
2
3
4
5
6
7
8
Name
DNC
V
S
GND
V
OUT
DNC
DNC
DNC
DNC
Function
Do not connect to external circuitry or ground. Pin 1 is denoted by chamfered corner.
Voltage supply
Ground
Output voltage
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
Do not connect to external circuitry or ground.
MPXA6115A
4
Sensors
Freescale Semiconductor, Inc.
2
2.1
Mechanical and Electrical Specifications
Maximum ratings
Table 2. Maximum ratings
(1)
Rating
Maximum pressure (P1 > P2)
Storage temperature
Operating temperature
Output source current @ full-scale output
(2)
Output sink current @ minimum pressure offset
(2)
Symbol
P
max
T
stg
T
A
I
o
+
I
o
-
Value
400
-40° to +125°
-40° to +125°
0.5
-0.5
Units
kPa
°C
°C
mAdc
mAdc
1.Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2.Maximum output current is controlled by effective impedance from V
OUT
to GND or V
OUT
to V
S
in the application circuit.
2.2
Operating characteristics
Table 3. Operating characteristics
(V
S
= 5.0 Vdc, T
A
= 25 °C unless otherwise noted, P1 > P2)
Characteristic
Pressure range
Supply voltage
(1)
Supply current
Minimum pressure offset
(2)
(0 °C to 85° C) @ V
S
= 5.0 Volts
Full-scale output
(3)
(0 °C to 85° C) @ V
S
= 5.0 Volts
Full-scale span
(4)
(0 °C to 85° C) @ V
S
= 5.0 Volts
Accuracy
(5)
(0 °C to 85° C)
Sensitivity
Response time
(6)
Warm-up time
(7)
Offset stability
(8)
1.Device is ratiometric within this specified excitation range.
2.Offset (V
off
) is defined as the output voltage at the minimum rated pressure.
3.Full-scale output (V
FSO
) is defined as the output voltage at the maximum or full-rated pressure.
4.Full-scale span (V
FSS
) is defined as the algebraic difference between the output voltage at full-rated pressure and the output voltage at the
minimum rated pressure.
5.Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at
25 °C due to all sources of error including the following:
Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or
maximum rated pressure at 25 °C.
TcSpan:
Output deviation over the temperature range of 0 °C to 85 °C, relative to 25 °C.
TcOffset:
Output deviation with minimum pressure applied, over the temperature range of 0 °C to 85 °C, relative to 25 °C.
6.Response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a
specified step change in pressure.
7.Warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
8.Offset stability is the product's output deviation when subjected to 1000 cycles of pulsed pressure, temperature cycling with bias test.
Symbol
P
OP
V
S
I
o
V
off
V
FSO
V
FSS
—
V/P
t
R
—
—
Min
15
4.75
—
0.133
4.633
4.433
—
—
—
—
—
Typ
—
5.0
6.0
0.200
4.700
4.500
—
45.0
1.0
20
±0.25
Max
115
5.25
10
0.268
4.768
4.568
±1.5
—
—
—
—
Unit
kPa
Vdc
mAdc
Vdc
Vdc
Vdc
%V
FSS
mV/kPa
ms
ms
%V
FSS
MPXA6115A
Sensors
Freescale Semiconductor, Inc.
5
stm32/stm8
